US Patent Issued to LAM RESEARCH on Dec. 9 for "Sublimation control using downstream pressure sensing" (California Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,469, issued on Dec. 9, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Sublimation control using downstream pressure sensing" was invented by Marvin Clayton Brees (Boulder Creek, Calif.), Davinder Sharma (San Jose, Calif.) and Panya Wongsenakhum (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system to control gas flow includes an ampoule to store a solid precursor. A heater is to heat the ampoule and to sublimate the solid precursor into a gaseous precursor. A mass flow controller is to regulate a flow of gaseous precursor from the ampoule to a substrate processing chamber. A pressure sensor is to measure a pressure of the g...