US Patent Issued to Lam Research on Dec. 9 for "Pulsing RF coils of a plasma chamber in reverse synchronization" (California Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,345, issued on Dec. 9, was assigned to Lam Research Corp. (Fremont, Calif.).

"Pulsing RF coils of a plasma chamber in reverse synchronization" was invented by Juline Shoeb (Fremont, Calif.), Tom A. Kamp (San Jose, Calif.) and Alexander Miller Paterson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for pulsing radio frequency (RF) coils are described. One of the methods includes supplying a first RF signal to a first impedance matching circuit coupled to a first RF coil, supplying a second RF signal to a second impedance matching circuit coupled to a second RF coil, and pulsing the first RF signal between a first ...