ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,509,772, issued on Dec. 30, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).
"Split showerhead cooling plate" was invented by Andrew Borth (Newberg, Ore.) and Sean M. Donnelly (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A cooling assembly includes a first subassembly and a second subassembly. The first subassembly is coupled to a showerhead of a substrate processing system. The first subassembly including a plurality of passages proximate to and in thermal communication with the showerhead. The second subassembly is removably coupled to the first subassembly. The second subassembly includes a plurality of protrusions that align w...