ALEXANDRIA, Va., Dec. 31 -- United States Patent no. D1,107,670, issued on Dec. 30, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).
"Showerhead for a substrate processing system" was invented by Eli Jeon (Sherwood, Ore.), Daniel Boatright (Estacada, Ore.), Philip Chen (Lake Oswego, Ore.), Debotosh Poddar (Durgapur, India), Kyle Watt Hart (Beaverton, Ore.), Douglas Walter Agnew (Portland, Ore.) and Kashyap Subramanya (Bangalore, India).
The patent was filed on April 25, 2022, under Application No. D/836,113.
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