ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,486,574, issued on Dec. 2, was assigned to Lam Research Corp. (Fremont, Calif.).
"Thermally controlled chandelier showerhead" was invented by Bin Luo (Beaverton, Ore.), Timothy Scott Thomas (Wilsonville, Ore.), Matthew B. Schick (Pflugerville, Texas), John Michael Wiltse (Lake Oswego, Ore.), Sean M. Donnelly (Portland, Ore.) and Michael John Selep (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Showerheads for semiconductor processing equipment are disclosed that include various features designed to promote thermal control of the showerhead in high-temperature applications."
The patent was filed on Aug. 21, 2020, under Application No. 17/...