US Patent Issued to Lam Research on Dec. 2 for "Auto-calibration to a station of a process module that spins a wafer" (Oregon, California Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,489,006, issued on Dec. 2, was assigned to Lam Research Corp. (Fremont, Calif.).

"Auto-calibration to a station of a process module that spins a wafer" was invented by Jacob L. Hiester (Beaverton, Ore.), Richard Blank (Fremont, Calif.), Peter Thaulad (Fremont, Calif.) and Paul Konkola (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafe...