US Patent Issued to LAM RESEARCH on Aug. 5 for "Coolant channel with internal fins for substrate processing pedestals" (California Inventors)

ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,381,105, issued on Aug. 5, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Coolant channel with internal fins for substrate processing pedestals" was invented by Feng Wang (Sunnyvale, Calif.), Alexander Matyushkin (San Jose, Calif.), Darrell Ehrlich (San Jose, Calif.) and Eric Samulon (Oakland, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A baseplate for a substrate support in a substrate processing system includes at least one coolant channel formed within the baseplate. The at least one coolant channel defines a volume within the baseplate configured to retain a coolant and follows a path configured to distribute the coolant in the volu...