ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,379,720, issued on Aug. 5, was assigned to Lam Research Corp. (Fremont, Calif.).
"Common terminal heater for ceramic pedestals used in semiconductor for fabrication" was invented by Karl F. Leeser (West Linn, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "System and methods for processing a substrate using a reactor with multiple heating zones and control of said heating zones using a common terminal shared between two power supplies are provided. The reactor includes a heater assembly for supporting the substrate and a showerhead for supplying process gases into the reactor. An inner heater and an outer heater are integrated in the heater assembly....