US Patent Issued to Lam Research on Aug. 26 for "Substrate pedestal including backside gas-delivery tube" (Oregon Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,398,464, issued on Aug. 26, was assigned to Lam Research Corp. (Fremont, Calif.).

"Substrate pedestal including backside gas-delivery tube" was invented by Troy Alan Gomm (Sherwood, Ore.) and Nick Ray Linebarger Jr. (Beaverton, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be processed, a process gas source in fluid communication with the vacuum chamber for supplying a process gas into the vacuum chamber, a showerhead module through which process gas from the process gas source is supplied to the processing zone ...