ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,397,435, issued on Aug. 26, was assigned to Lam Research Corp. (Fremont, Calif.).
"Substrate location detection and adjustment" was invented by Michael John Martin (Union City, Calif.), Yuhou Wang (Fremont, Calif.) and Alexander Miller Paterson (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods are provided for positioning a wafer in relation to a datum structure. In one example, a system comprises a camera arrangement including at least two cameras, each of the at least two cameras including a field of view when positioned in the camera arrangement, each field of view including a peripheral edge of the wafer and a peri...