US Patent Issued to Lam Research on Aug. 26 for "Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber" (Oregon Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,880, issued on Aug. 26, was assigned to Lam Research Corp. (Fremont, Calif.).

"Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber" was invented by Eli Jeon (Sherwood, Ore.), Michael Philip Roberts (Tigard, Ore.), Douglas Walter Agnew (Portland, Ore.), Daniel Boatright (Estacada, Ore.), Arun Anandhan Duraisamy (Wilsonville, Ore.), Joseph R. Abel (West Linn, Ore.) and William Laurence McDaniel (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a system for a semiconductor processing. The system includes a semiconductor processing chamber having a plurality of proces...