ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,601, issued on Aug. 19, was assigned to Lam Research Corp. (Fremont, Calif.).
"Impedance transformation in radio-frequency-assisted plasma generation" was invented by Eller Y. Juco (Tualatin, Ore.), Thomas Lee Frederick (West Linn, Ore.), Karl Frederick Leeser (West Linn, Ore.) and Paul Konkola (West Linn, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for providing signals to a device may include one or more radiofrequency signal generators, and electrically-small transmission line, which couples signals from the one or more RF signal generators to the fabrication chamber. The apparatus may additionally include a reactive circuit ...