US Patent Issued to Lam Research on Aug. 12 for "Matched tcr joule heater designs for electrostatic chucks" (California Inventor)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,964, issued on Aug. 12, was assigned to Lam Research Corp. (Fremont, Calif.).

"Matched tcr joule heater designs for electrostatic chucks" was invented by Eric A. Pape (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming a substrate support in a substrate processing system includes forming at least one ceramic layer and arranging a plurality of thermal elements adjacent to the ceramic layer in one or more thermal zones. Each of the thermal zones includes at least one of the thermal elements and each of the thermal elements includes a first resistive material having a positive thermal coefficient of resistance (TCR) and...