ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,916, issued on Aug. 12, was assigned to Lam Research Corp. (Fremont, Calif.).
"Magnetic field control system" was invented by Alecia Chantalle Griffin (San Jose, Calif.), Anthony de la Llera (Fremont, Calif.), Peter Bradley Phillips (Clayton, Calif.) and Bing Ji (Pleasanton, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a vacuum chamber with a processing zone for processing a substrate using plasma and at least one magnetic field source configured to generate one or more active magnetic fields through the processing zone. The apparatus also includes a magnetic field sensor configured to detect a sign...