US Patent Issued to Lam Research on Aug. 12 for "Low frequency RF generator and associated electrostatic chuck" (California Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,909, issued on Aug. 12, was assigned to Lam Research Corp. (Fremont, Calif.).

"Low frequency RF generator and associated electrostatic chuck" was invented by Alexei M. Marakhtanov (Albany, Calif.), Felix Leib Kozakevich (Sunnyvale, Calif.), Bing Ji (Pleasanton, Calif.), Ranadeep Bhowmick (San Jose, Calif.), John Patrick Holland (San Jose, Calif.) and Alexander Matyushkin (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system having the low frequency RF generator is described. The low frequency RF has an operating frequency range between 10 kilohertz (kHz) and 330 kHz. The low frequency RF generator generates an RF signal. The syst...