US Patent Issued to Lam Research on Aug. 12 for "Electrostatic chuck for use in semiconductor processing" (Oregon Inventor)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,965, issued on Aug. 12, was assigned to Lam Research Corp. (Fremont, Calif.).

"Electrostatic chuck for use in semiconductor processing" was invented by Troy Alan Gomm (Tigard, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be processed, a process gas source in fluid communication with the vacuum chamber for supplying a process gas into the vacuum chamber, a showerhead module through which process gas from the process gas source is supplied to the processing zone of the vacuum chamber, and a substrate pedestal ...