US Patent Issued to LAM RESEARCH on Aug. 12 for "Data capture and transformation to support data analysis and machine learning for substrate manufacturing systems" (Austrian, American Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,134, issued on Aug. 12, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Data capture and transformation to support data analysis and machine learning for substrate manufacturing systems" was invented by Chung-Ho Huang (San Jose, Calif.), Vincent Wong (Fremont, Calif.), Paul Ronald Ballintine (Pleasanton, Calif.), Henry Chan (Morgan Hill, Calif.), Nicolas Grinschgl (Riegersdorf, Austria), John A. Jensen (Alameda, Calif.), Chad Russell Weetman (Pleasanton, Calif.) and Rainer Unterguggenberger (Newark, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A data collection system for semiconductor manufacturing includes: T substrate processing t...