US Patent Issued to Lam Research on April 8 for "Station-to-station control of backside bow compensation deposition" (Oregon Inventors)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,272,608, issued on April 8, was assigned to Lam Research Corp. (Fremont, Calif.).

"Station-to-station control of backside bow compensation deposition" was invented by Yanhui Huang (Sherwood, Ore.) and Vignesh Chandrasekar (King City, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods for reducing warpage of bowed semiconductor substrates, including providing a first substrate to a first station in a semiconductor processing chamber, providing a second substrate to a second station in the semiconductor processing chamber, concurrently depositing a first bow compensation layer of material on the backside of the first substrate at the first statio...