US Patent Issued to Lam Research on April 22 for "Systems and methods for achieving peak ion energy enhancement with a low angular spread" (California Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,461, issued on April 22, was assigned to Lam Research Corp. (Fremont, Calif.).

"Systems and methods for achieving peak ion energy enhancement with a low angular spread" was invented by Juline Shoeb (Fremont, Calif.), Ying Wu (Livermore, Calif.) and Alex Paterson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for increasing peak ion energy with a low angular spread of ions are described. In one of the systems, multiple radio frequency (RF) generators that are coupled to an upper electrode associated with a plasma chamber are operated in two different states, such as two different frequency levels, for pulsing of t...