US Patent Issued to Lam Research on April 22 for "Control of plasma formation by RF coupling structures" (Texas, Oregon, California Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,462, issued on April 22, was assigned to Lam Research Corp. (Fremont, Calif.).

"Control of plasma formation by RF coupling structures" was invented by Hema Swaroop Mopidevi (Georgetown, Texas), Lee Chen (Cedar Creek, Texas), Thomas W. Anderson (Hayward, Calif.), Shaun Tyler Smith (Portland, Ore.) and Neil M. P. Benjamin (Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for forming a plasma may include one or more coupling ports to accept a radiofrequency (RF) current. The apparatus may additionally include one or more coupling structures which may include one or more conductive loops to permit the RF current to conduct fr...