US Patent Issued to KYOCERA TECHNOLOGIES on Jan. 28 for "MEMS resonator with high quality factor and its use" (Finnish Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,212,300, issued on Jan. 28, was assigned to KYOCERA TECHNOLOGIES OY (Espoo, Finland).

"MEMS resonator with high quality factor and its use" was invented by Aarne Oja (Espoo, Finland), Antti Jaakkola (Espoo, Finland) and Panu Koppinen (Espoo, Finland).

According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS (microelectromechanical system) resonator with a material layer of single-crystalline silicon, at least one layer made of material with low thermal diffusivity to reduce thermoelastic dissipations in the MEMS resonator, a layer of piezoelectric material, and a layer made of electrically conducting material. The layer with low thermal diffusivity is betwee...