ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,763, issued on Sept. 9, was assigned to KYOCERA Corp. (Kyoto, Japan).
"Wafer boat" was invented by Shoichi Ota (Higashiomi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer boat according to the present disclosure includes a plurality of support columns, each having a pillar shape and comprising a plurality of grooves configured to have a wafer placed thereon, and support plates configured to support both end portions of the plurality of support columns, respectively. Each of the plurality of support columns are formed of a ceramic containing aluminum oxide or silicon carbide as a main constituent, and an outer side surface of the plura...