ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,093, issued on Nov. 18, was assigned to KSM COMPONENT Co. LTD. (Gimpo-si, South Korea).
"Ceramic susceptor having hybrid coating" was invented by Yun Ho Kim (Gimpo-si, South Korea), Joo Hwan Kim (Gimpo-si, South Korea), Hwan Young Park (Gimpo-si, South Korea), Bo Sung Kim (Gimpo-si, South Korea) and Hyun Taek Lee (Gimpo-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A ceramic susceptor is disclosed, which not only has excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to conventional ceramic susceptors, but also has excellent plasma resistance without peeling of the coating laye...