ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,378,654, issued on Aug. 5, was assigned to KOMICO LTD. (Anseong-si, South Korea).
"Method of forming plasma-resistant coating layer with low brightness using heat treatment process of rare-earth metal compound powder" was invented by Se Yong Kim (Anseong-si, South Korea), Min Gyu Lee (Anseong-si, South Korea), Joo Jin (Anseong-si, South Korea) and Tae Soo Jang (Anseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming a plasma-resistant coating layer with low brightness includes: (a) performing a heat treatment process on a primary rare-earth metal compound powder having a grain size in a range of 20 nm to 60 nm to prepar...