US Patent Issued to KOKUSAI ELECTRIC on Sept. 30 for "Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium storing program" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,428,729, issued on Sept. 30, was assigned to KOKUSAI ELECTRIC Corp. (Tokyo).

"Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium storing program" was invented by Kazuo Nakaya (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a technique that includes: an exhaust line including a second pressure regulation valve; a bypass line including a first pressure regulation valve; and a pressure control controller configured to control the first pressure regulation valve and the second pressure regulation valve, and configured to: adjust an opening degre...