US Patent Issued to Kokusai Electric on Oct. 7 for "Batch type vertical substrate processing apparatus comprising cooling system having distributor supplying cooling fluid to plurality of first coolers and auxiliary system, and supplying merged cooling fluid to second cooler" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,013, issued on Oct. 7, was assigned to Kokusai Electric Corp. (Tokyo).

"Batch type vertical substrate processing apparatus comprising cooling system having distributor supplying cooling fluid to plurality of first coolers and auxiliary system, and supplying merged cooling fluid to second cooler" was invented by Mikio Ono (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a technique that includes a plurality of first coolers installed in or around a process furnace configured to process a substrate, and configured to perform cooling by a cooling fluid; a second cooler installed in or around the process furnace and configu...