US Patent Issued to Kokusai Electric on March 25 for "Substrate processing apparatus and furnace opening closer" (Japanese Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,261,066, issued on March 25, was assigned to Kokusai Electric Corp. (Tokyo).

"Substrate processing apparatus and furnace opening closer" was invented by Takashi Nogami (Toyama, Japan) and Norihiro Yamashima (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one aspect of the technique, there is provided a substrate processing apparatus including: a reaction chamber in which a substrate is processed; a lid configured to close a furnace opening of the reaction chamber; a base provided below the lid; and a connector provided to connect the lid and the base. The connector includes: a shaft provided at the lid; an elastic structure p...