US Patent Issued to KOKUSAI ELECTRIC on June 24 for "Substrate processing apparatus and recording medium" (Japanese Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,000, issued on June 24, was assigned to KOKUSAI ELECTRIC Corp. (Tokyo).

"Substrate processing apparatus and recording medium" was invented by Masanori Okuno (Toyama, Japan), Hideki Horita (Toyama, Japan), Kazuyoshi Yamamoto (Toyama, Japan), Kazuhide Asai (Toyama, Japan) and Toshihiko Yonejima (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a technique that includes: a controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate. The controller acquires device data, which includes at least one of a current value, a rotational speed, and a back pressu...