ALEXANDRIA, Va., July 30 -- United States Patent no. 12,371,782, issued on July 29, was assigned to KOKUSAI ELECTRIC Corp. (Tokyo).
"Method of manufacturing semiconductor device and non-transitory computer-readable recording medium" was invented by Masanori Okuno (Toyama, Japan), Tatsuya Yotsutani (Toyama, Japan), Masaya Nagato (Toyama, Japan) and Toshihiko Yonejima (Toyama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Described herein is a technique capable of removing by-products before the by-products are deposited to an exhaust part. According to one aspect of the technique, there is provided a method of manufacturing a semiconductor device including: (a) processing a substrate while maintaining ...