ALEXANDRIA, Va., July 23 -- United States Patent no. 12,365,982, issued on July 22, was assigned to KOKUSAI ELECTRIC Corp. (Tokyo).
"Processing apparatus and exhaust system" was invented by Masanori Okuno (Toyama, Japan), Toshihiko Yonejima (Toyama, Japan), Masakazu Sakata (Toyama, Japan) and Masamichi Yachi (Toyama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "According to one aspect of the technique, there is provided a processing apparatus including: a process structure including: a process furnace, in which an object to be processed is processed by a gas, provided in a housing; and an opening configured to enable a maintenance and provided at a rear side of the housing; an exhaust structure confi...