US Patent Issued to Kokusai Electric on Feb. 3 for "Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,388, issued on Feb. 3, was assigned to Kokusai Electric Corp. (Tokyo).

"Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium" was invented by Koei Kuribayashi (Toyama, Japan), Kenji Kameda (Toyama, Japan), Tsukasa Kamakura (Toyama, Japan), Takeo Hanashima (Toyama, Japan), Hiroaki Hiramatsu (Toyama, Japan), Shinya Ebata (Toyama, Japan), Hiroto Yamagishi (Toyama, Japan), Sadao Hisakado (Toyama, Japan), Takafumi Sasaki (Toyama, Japan), Takatomo Yamaguchi (Toyama, Japan) and Shuhei Saido (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is prov...