US Patent Issued to Kokusai Electric on Dec. 23 for "Substrate temperature sensor, substrate retainer and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,504,332, issued on Dec. 23, was assigned to Kokusai Electric Corp. (Tokyo).

"Substrate temperature sensor, substrate retainer and substrate processing apparatus" was invented by Tokunobu Akao (Toyama, Japan), Hitoshi Murata (Toyama, Japan), Akinori Tanaka (Toyama, Japan) and Masaaki Ueno (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one aspect of the technique, there is provided a substrate temperature sensor configured to measure a temperature of a substrate, wherein the substrate temperature sensor is provided in a protective pipe provided to be accommodated in a recess formed at a portion of a substrate retainer on which ...