US Patent Issued to Kokusai Electric on Dec. 23 for "Non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,503,767, issued on Dec. 23, was assigned to Kokusai Electric Corp. (Tokyo).

"Non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method" was invented by Takuya Joda (Toyama, Japan), Yukinao Kaga (Toyama, Japan) and Yoshimasa Nagatomi (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described herein is a technique capable of improving characteristics of a film. According to one or more embodiments of the present disclosure, there is provided a technique that includes: (a) performing (a-1) supplying in parallel a metal-containing gas and a reducing gas that contains silicon and hydrogen a...