ALEXANDRIA, Va., June 10 -- United States Patent no. 12,291,445, issued on May 6, was assigned to Knowles Electronics LLC (Itasca, Ill.).
"Dual diaphragm dielectric sensor" was invented by Peter V. Loeppert (Durand, Ill.) and Michael Pedersen (Long Grove, Ill.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical systems (MEMS) device comprises a MEMS die that comprises first and second diaphragms, a first plurality of electrodes each disposed on the first diaphragm, and a second plurality of electrodes each disposed on the second diaphragm. A fixed dielectric element is disposed between the first and second diaphragms and includes a plurality of apertures. The MEMS die further comprises a ...