ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,509,344, issued on Dec. 30, was assigned to Knowles Electronics LLC (Itasca, Ill.).
"Microelectromechanical systems die" was invented by Yunfei Ma (Buffalo Grove, Ill.), Ann George (Itasca, Ill.) and Shubham Shubham (Schaumburg, Ill.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical system (MEMS) die includes a substrate, a diaphragm made from a conductive material and supported over the substrate, and a backplate separated from the diaphragm and disposed on a side of the diaphragm opposite the substrate. The backplate includes a central electrode layer disposed on a surface facing the diaphragm, and a ring electrode layer disposed...