US Patent Issued to KLA on Sept. 23 for "Imaging reflectometry for inline screening" (American, German, British Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,422,376, issued on Sept. 23, was assigned to KLA Corp. (Milpitas, Calif.).

"Imaging reflectometry for inline screening" was invented by John Charles Robinson (Austin, Texas), Stilian Pandev (Santa Clara, Calif.), Shifang Li (Pleasanton, Calif.), Mike Von Den Hoff (Munich), Justin Lach (Portage, Mich.), Barry Saville (Gansevoort, Great Britain), David W. Price (Austin, Texas), Robert J. Rathert (Mechanicsville, Va.), Chet V. Lenox (Lexington, Texas), Thomas Groos (Mengerskirchen, Germany) and Oreste Donzella (San Ramon, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A die screening system may receive die-resolved metrology data for a population o...