US Patent Issued to KLA on Oct. 21 for "High-power compact VUV laser-sustained plasma light source" (California Inventor)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,452,987, issued on Oct. 21, was assigned to KLA Corp. (Milpitas, Calif.).

"High-power compact VUV laser-sustained plasma light source" was invented by Ilya Bezel (Mountain View, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A compact LSP broadband light includes a gas containment structure containing a mixture of a first noble gas and a second noble gas, a filter tube positioned within the gas containment structure, an input window, and a pump source. The laser pump source directs an optical pump through the input window to sustain a plasma within the filter tube. The first noble gas absorbs broadband light within a first and a second wavelength...