ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,319, issued on Oct. 21, was assigned to KLA Corp. (Milpitas, Calif.).
"Electron source with magnetic suppressor electrode" was invented by Nikolai Chubun (Palo Alto, Calif.), Xinrong Jiang (Palo Alto, Calif.), Youfei Jiang (Milpitas, Calif.) and Christopher Sears (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electron source is disclosed. The electron source may include an electron emitter configured to generate one or more electron beams. The electron source may further include a magnetic suppressor electrode surrounding at least a portion of the electron emitter. The magnetic suppressor electrode may be formed from one or more ...