US Patent Issued to KLA on Oct. 14 for "Quantitative linear independent vector based method (QLIVBM) for image alignment" (Oregon Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,064, issued on Oct. 14, was assigned to KLA Corp. (Milpitas, Calif.).

"Quantitative linear independent vector based method (QLIVBM) for image alignment" was invented by Qilong Huang (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for image alignment are provided. One method includes separately aligning candidate alignment target images in images generated for a specimen to corresponding setup images for setup alignment targets selected to have mutually linearly independent vectors between locations of the setup alignment targets and a reference location. The method also includes, for any of the candidate images suc...