US Patent Issued to KLA on Oct. 14 for "Dynamic control of machine learning based measurement recipe optimization" (California, Michigan Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,443,840, issued on Oct. 14, was assigned to KLA Corp. (Milpitas, Calif.).

"Dynamic control of machine learning based measurement recipe optimization" was invented by Stilian Ivanov Pandev (Santa Clara, Calif.) and Arvind Jayaraman (New Hudson, Mich.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for training and implementing metrology recipes while dynamically controlling the convergence trajectories of multiple performance objectives are described herein. Performance metrics are employed to regularize the optimization process employed during measurement model training, model-based regression, or both. Weighting values associated wit...