US Patent Issued to KLA on Nov. 4 for "Systems and methods for uniform cooling of electromagnetic coil" (California Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,462,968, issued on Nov. 4, was assigned to KLA Corp. (Milpitas, Calif.).

"Systems and methods for uniform cooling of electromagnetic coil" was invented by Oscar Florendo (Hollister, Calif.) and Vincent Nguyen (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for uniform cooling of an electromagnetic coil are provided. The system includes an electromagnetic coil, a cooling structure, and a cooling fluid source. The cooling structure surrounds the entirety of the perimeter of the electromagnetic coil, and includes a first cooling channel and a second cooling channel arranged alternately about the electromagnetic coil. The...