ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,687, issued on Nov. 25, was assigned to KLA Corp. (Milpitas, Calif.).
"Single cell in-die metrology targets and measurement methods" was invented by Mark Ghinovker (Yoqneam llit, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "Metrology targets and methods are provided, which comprise at least two overlapping structures configured to be measurable in a mutually exclusive manner at least at two different corresponding optical conditions. The targets may be single cell targets which are measured at different optical conditions which enable independent measurements of the different layers of the target. Accordingly, the targets may be designed to...