US Patent Issued to KLA on Nov. 25 for "Detecting defects on specimens" (Chinese, American Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,091, issued on Nov. 25, was assigned to KLA Corp. (Milpitas, Calif.).

"Detecting defects on specimens" was invented by Li Yu (Shanghai), Wei Si (Shanghai), Prashant Verma (Fremont, Calif.), Xiaochun Li (San Jose, Calif.) and Sangbong Park (Danville, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for detecting defects on a specimen are provided. One system performs double detection in which at least one of the reference images compared to a test image is a computed reference image generated from multiple images corresponding to the test image. The other reference image may or may not be computed from more than one of the mu...