ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,890, issued on Nov. 25, was assigned to KLA Corp. (Milpitas, Calif.).
"Deep learning based mode selection for inspection" was invented by Rajkumar Theagarajan (Milpitas, Calif.), Yujie Dong (Newark, Calif.), Jing Zhang (Santa Clara, Calif.), Brian Duffy (San Jose, Calif.), Atiqur Rahman Chowdhury (Milpitas, Calif.), Kris Bhaskar (San Jose, Calif.), Yang Li (San Jose, Calif.) and Graham Jensen (Milpitas, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a s...