US Patent Issued to KLA on Nov. 18 for "Semiconductor measurements with robust in-line tool matching" (California Inventor)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,281, issued on Nov. 18, was assigned to KLA Corp. (Milpitas, Calif.).

"Semiconductor measurements with robust in-line tool matching" was invented by Stilian Ivanov Pandev (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for improved monitoring of tool drift and tool-to-tool matching across large fleets of measurement systems employed to measure semiconductor structures are presented herein. One or more Quality Control (QC) wafers are measured by each of a fleet of measurement systems. Values of system variables are extracted from the QC measurement data associated with each measurement system using a trained QC...