US Patent Issued to KLA on Nov. 18 for "Automated focusing system for tracking specimen surface with a configurable focus offset" (California Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,557, issued on Nov. 18, was assigned to KLA Corp. (Milpitas, Calif.).

"Automated focusing system for tracking specimen surface with a configurable focus offset" was invented by Xiumei Liu (Fremont, Calif.), Kai Cao (Fremont, Calif.), Richard Wallingford (San Jose, Calif.), Matthew Giusti (San Jose, Calif.) and Brooke Bruguier (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An auto-focusing system is disclosed. The system includes an illumination source. The system includes an aperture. The system includes a projection mask. The system includes a detector assembly. The system includes a relay system, the relay system being configured...