US Patent Issued to KLA on June 17 for "System for automatic diagnostics and monitoring of semiconductor defect die screening performance through overlay of defect and electrical test data" (Texas, Virginia, California, Michigan Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,332,182, issued on June 17, was assigned to KLA Corp. (Milpitas, Calif.).

"System for automatic diagnostics and monitoring of semiconductor defect die screening performance through overlay of defect and electrical test data" was invented by David W. Price (Austin, Texas), Robert J. Rathert (Mechanicsville, Va.), Chet V. Lenox (Lexington, Texas), Oreste Donzella (San Ramon, Calif.), Justin Lach (Portage, Mich.) and John Robinson (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for determining a diagnosis of a screening system are disclosed. Such systems and methods include identifying defect results based on inline charac...