US Patent Issued to KLA on July 8 for "Finding semiconductor defects using convolutional context attributes" (California Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,353,970, issued on July 8, was assigned to KLA Corp. (Milpitas, Calif.).

"Finding semiconductor defects using convolutional context attributes" was invented by Abdurrahman Sezginer (Monte Sereno, Calif.), Gordon Rouse (Dublin, Calif.) and Manikandan Mariyappan (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Context attributes for optical imaging of a patterned layer of a semiconductor die are calculated. Calculating the context attributes includes calculating convolutions of a pattern of the patterned layer with respective kernels of a plurality of kernels, wherein the plurality of kernels is orthogonal. Defects on the semiconductor die ...