ALEXANDRIA, Va., July 30 -- United States Patent no. 12,372,486, issued on July 29, was assigned to KLA Corp. (Milpitas, Calif.).
"Noise diagnostics for an electron beam inspection system with swathing" was invented by Bo Xiong (Milpitas, Calif.), Hedong Yang (Santa Clara, Calif.) and Kay Wang (Milpitas, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Parameters from an inspection image representing mechanical vibrations and electromagnetic interference can be determined. An X-direction vibration spectrum can be determined based on the X-direction offsets. A Y-direction vibration spectrum can be determined based on the Y-direction offsets. The determinations can be based on a swath image of a workpiece...