US Patent Issued to KLA on July 29 for "3D profilometry with a Linnik interferometer" (Israeli, Belgian, American Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,372,345, issued on July 29, was assigned to KLA Corp. (Milpitas, Calif.).

"3D profilometry with a Linnik interferometer" was invented by Amnon Manassen (Haifa, Israel), Yoav Grauer (Haifa, Israel), Shlomo Eisenbach (Milpitas, Calif.), Stephen Hiebert (Milpitas, Calif.), Avner Safrani (Misgav, Israel) and Roel Gronheid (Leuven, Belgium).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for generating volumetric data are disclosed. Such systems and methods may include scanning a sample at a plurality of focal planes located along a depth direction of the sample. Such systems and methods may include generating, via a detector of a metrology...